France – Electromechanical equipment – Equipement de 300mm de gravure sélective Si-SiGe - Dry selective_SiSiGe_etching tool
closedCOMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Value
unstated
Published
16 Feb 2026
Deadline
—
Type
opportunity
31720000 · Electrical machinery & apparatus31712100 · Electrical machinery & apparatusFRK24
Description
Le CEA Leti, pour ses activités de recherche, qui visent à développer les technologies FDSOI 10nm et au-delà (FDSOI10), souhaite faire l’acquisition d’un équipement de gravure FEOL/MEOL pour sa salle-blanche. L’équipement sera capable de traiter des wafers de 300mm et permettra la gravure hautement sélective et isotropique du silicium (Si) et silicium-germanium (SiGe).
Key facts
- Procedure
- neg-w-call
- Submit via
- https://www.marches-publics.gouv.fr
- Contact
- thomas.zemerli@cea.fr
- Category
- supplies
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Provenance
- Source
- ted-eu
- Notice id
- 108390-2026
- First seen
- 22 Aug 2026
- Last updated
- 28 Aug 2026
Licence EU reuse — Commission Decision 2011/833/EU ↗
Source: TED — Tenders Electronic Daily (ted.europa.eu), © European Union, reused under Commission Decision 2011/833/EU.
View at source ↗
GET /api/v1/tenders/05b57aa5-a186-4fba-a36d-883a264deb80The source notice is authoritative — verify deadlines and documents there before bidding.